Patent · US Active

Circuit substrate structure

US8692266B2 · kind B2 · utility

0Cited by
2References
6Claims
0Family size

Assignee

Inventor

Key dates

Filing dateApr 2, 2013
Grant dateApr 8, 2014
Priority date
Expiry dateApr 2, 2033

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10H20/856
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A circuit substrate structure including a substrate, a dielectric stack layer, a first plating layer and a second plating layer is provided. The substrate has a pad. The dielectric stack layer is disposed on the substrate and has an opening exposing the pad, wherein the dielectric stack layer includes a first dielectric layer, a second dielectric layer and a third dielectric layer located between the first dielectric layer and the second dielectric layer, and there is a gap between the portion of the first dielectric layer surrounding the opening and the portion of the second dielectric layer surrounding the opening. The first plating layer is disposed at the dielectric stack layer. The second plating layer is disposed at the pad, wherein the gap isolates the first plating layer from the second plating layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.