Patent · US Active

System and method for use in determining the thickness of a layer of interest in a multi-layer structure

US8692564B2 · kind B2 · utility

0Cited by

5References

8Claims

0Family size

Assignee

General Electric Company · US

Inventors

Atanu Saha · Bengaluru, IN
Krishnamurthy Anand · Bengaluru, IN
Hari Nadathur Seshadri · Savanuru, IN
Karthick Vilapakkam Gourishankar · Downers Grove, US
Filippo Cappuccini · Firenze, IT

Key dates

Filing date	Feb 4, 2011
Grant date	Apr 8, 2014
Priority date	—
Expiry date	Mar 26, 2032

Classification

Technology area (CPC G)Physics
CPC primaryG01B7/105
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A method for use in determining the thickness of a layer of interest in a multi-layer structure. A first electrode is positioned in contact with a first surface of the multi-layer structure, and a second electrode is positioned in contact with a second surface of the multi-layer structure. The second surface is substantially opposite the first surface. The first electrode is pressed against the multi-layer structure at a predetermined sampling pressure, and the structure is optionally adjusted to a predetermined sampling temperature. The electrical impedance between the first electrode and the second electrode is measured.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.