Fluidic systems and methods of determining properties of fluids flowing therein
US8695418B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 25, 2011 |
| Grant date | Apr 15, 2014 |
| Priority date | — |
| Expiry date | Jul 23, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N9/002
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Fluidic systems and methods of determining properties of fluids flowing therein. The fluidic systems and methods make use of a micromachined device that determines at least one property of the fluid within the system. The micromachined device includes a base structure on a substrate and a tube structure extending from the base structure and spaced apart from a surface of the substrate. The tube structure has at least one pair of geometrically parallel tube portions substantially lying in a plane, and at least one continuous internal passage defined at least in part within the parallel tube portions. A drive element induces vibrational movement of the tube structure in the plane of the tube structure and induces resonant vibrational movements in the tube portions in the plane of the tube structure. A sensing element senses deflections of each tube portion in the plane of the tube structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.