Patent · US Active

Micromechanical component having a test structure for determining the layer thickness of a spacer layer and method for manufacturing such a test structure

US8695427B2 · kind B2 · utility

0Cited by

10References

8Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Jochen Reinmuth · Reutlingen, DE
Ralf Boessendoerfer · Dinkelsbühl, DE
Axel Franke · Ditzingen, DE
Mirko Hattass · Stuttgart, DE

Key dates

Filing date	May 26, 2011
Grant date	Apr 15, 2014
Priority date	—
Expiry date	Feb 14, 2032

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/49124
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A micromechanical component is described including a substrate having a spacer layer and a test structure for ascertaining the thickness of the spacer layer. The test structure includes a seismic mass, which is elastically deflectable along a measuring axis parallel to the substrate, a first electrode system and a second electrode system for deflecting the seismic mass along the measuring axis, having a mass electrode, which is produced by a part of the seismic mass, and a substrate electrode, which is situated on the substrate in each case, the first electrode system being designed to be thicker than the second electrode system by the layer thickness of the spacer layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.