Patent · US Active

Probe end module for articulated arms

US8695447B2 · kind B2 · utility

7Cited by

6References

13Claims

0Family size

Assignee

NIKON METROLOGY NV · BE

Inventor

Stephen James Crampton · San Francisco, US

Key dates

Filing date	Nov 1, 2005
Grant date	Apr 15, 2014
Priority date	—
Expiry date	Feb 2, 2029

Classification

Technology area (CPC G)Physics
CPC primaryG01B21/047
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A probe end module system for an arm comprising: a probe end module having an arm end and an opposing probe end; a module-arm interface located at the arm end; at least one module-probe interface located at the probe end; the arm further comprising a movable member and a movable position reporting device.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.