Patent · US Active

Multilayer microfluidic probe head and method of fabrication thereof

US8695639B2 · kind B2 · utility

9Cited by

20References

9Claims

0Family size

Assignee

International Business Machines Corporation · US

Inventors

Emmanuel Delamarche · Adliswil, CH
Ute Drechsler · Thalwil, CH
Robert Lovchik · Thalwil, CH

Key dates

Filing date	May 7, 2010
Grant date	Apr 15, 2014
Priority date	—
Expiry date	Mar 27, 2031

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T137/87885
WIPO fieldChemical engineering
WIPO sectorChemistry

Abstract

A micro fluidic probe head includes a first layer, a second layer, and a first tubing port extending from an upper face of the first layer. The first layer has a first via, enabling fluid communication between the first port and a lower face of the first layer. The second layer includes a first aperture on a face, and a first microchannel enabling fluid communication between an upper face of the second layer, facing the lower face of the first layer, and the first aperture. The head enables fluid communication between the first via and the first microchannel. At least a portion of the first microchannel is a groove open on the upper face of the second layer, closed by a portion of a lower face of a layer of the head. The probe head further comprises a second tubing port, a second via, a second aperture and a second micro channel.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.