Substrate conveying roller, thin film manufacturing device, and thin film manufacturing method
US8697582B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 30, 2012 |
| Grant date | Apr 15, 2014 |
| Priority date | — |
| Expiry date | Oct 30, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E60/10
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A substrate-conveying roller includes a first shell, a second shell, an internal block, a manifold, and a clearance. The first shell has a plurality of first through holes serving as supply paths for a gas. The internal block is disposed inside the first shell. The manifold is formed in the internal block so as to guide the gas to the first through holes within the region of a specific angle. The clearance is formed so as to guide the gas to the first through holes outside the region of the specific angle. The second shell has second through holes for guiding the gas from the manifold to the first through holes, and is disposed between the first shell and the internal block. The central axes of the first through hole are offset from the central axes of the second through holes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.