Z-axis capacitive accelerometer
US8701490B2 · kind B2 · utility
7Cited by
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11Claims
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Key dates
| Filing date | Jul 12, 2011 |
| Grant date | Apr 22, 2014 |
| Priority date | — |
| Expiry date | Jun 19, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0837
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A Z-axis capacitive accelerometer includes a substrate, a capacitance sensing plate, a proof mass and at least one pair of spring beams. The capacitance sensing plate includes two symmetrical sense areas to create differential capacitive measurement. A decoupling structure separates the proof mass and the capacitance sensing plate and their rotational motions from each other. In the proposed Z axis capacitive accelerometer, the distance of the capacitance sensing plate relative to its rotation axis is considerably increased, thereby effectively enhancing the sensitivity when measuring the Z-axis acceleration.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.