Patent · US Active

Coaxial interferometer and inspection probe

US8705041B2 · kind B2 · utility

2Cited by

16References

19Claims

0Family size

Assignee

Promet International, Inc. · US

Inventors

Ryan Elliot Eckman · Columbus, US
Peter David Koudelka · Windom, US
Lubomir Koudelka · Shoreview, US

Key dates

Filing date	May 20, 2011
Grant date	Apr 22, 2014
Priority date	—
Expiry date	Feb 6, 2032

Classification

Technology area (CPC G)Physics
CPC primaryG02B21/0004
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An optical probe has optical components of an interferometer and includes an optical axis, at least one optical source for emitting light along an illumination path that is at least partially coaxial with the optical axis, a first beam splitter and a first lens. The first beam splitter intersects the optical axis and splits the light from the at least one optical source into a first beam for traveling along a reference path that is coaxial with the optical axis to a reference surface and a second beam for traveling along a test path that is coaxial with the optical axis to a specimen. The first lens is interposed along the reference path.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.