Microelectromechanical system with a center of mass balanced by a mirror substrate
US8705159B2 · kind B2 · utility
3Cited by
3References
23Claims
0Family size
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Key dates
| Filing date | May 12, 2011 |
| Grant date | Apr 22, 2014 |
| Priority date | — |
| Expiry date | May 7, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49124
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
MEMS and fabrication techniques for positioning the center of mass of released structures in MEMS are provided. In an embodiment, a mirror substrate is affixed to a member partially released from a first substrate and a through hole formed in the second substrate is accessed to complete release of the member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.