Patent · US Active

Distributed feedback laser having enhanced etch stop features

US8705582B2 · kind B2 · utility

0Cited by
2References
5Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 1, 2013
Grant dateApr 22, 2014
Priority date
Expiry dateJul 1, 2033

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01S5/34306
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

In one example embodiment, a DFB laser includes a substrate; an active region positioned above the substrate; a grating layer positioned above the active region, the grating layer including a portion that serves as a primary etch stop layer; a secondary etch stop layer positioned above the grating layer; and a spacer layer interposed between the grating layer and the secondary etch stop layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.