Sensor has combined in-plane and parallel-plane configuration
US8707781B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 10, 2009 |
| Grant date | Apr 29, 2014 |
| Priority date | — |
| Expiry date | Aug 4, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/223
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor senses a magnitude of a physical parameter of the sensor's environment. The sensor has first and second electrodes, and a material layer between them. The material has an electrical property, e.g., capacitance or resistance, whose value depends on the magnitude of the physical parameter. The first electrode is formed in a first layer, and the second electrode is formed in a second layer, different from the first layer. The first layer has a trench and an elevation next to the trench. The trench has a bottom wall and a side wall. The material is positioned on the bottom wall and on the side wall and on top of the elevation. The trench accommodates at least a part of the second electrode. The second electrode leaves exposed the material formed on top of the elevation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.