Adaptive deformable mirror for compensation of defects of a wavefront

US8708508B2 · kind B2 · utility

Assignees

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE
• Friedrich-Schiller-Universitat Jena · DE

Inventors

• Claudia Bruchmann · Jena, DE
• Erik Beckert · Arnstadt, DE
• Thomas Peschel · Jena, DE
• Christoph Damm · Jena, DE
• Sylvia Gebhardt · Dresden, DE

Key dates

• Filing date: Mar 17, 2009
• Grant date: Apr 29, 2014
• Expiry date: Jun 30, 2029

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T156/1052
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An adaptive mirror that includes a substrate layer, on the first surface of which a reflecting layer and on the second surface of which at least one actuator is disposed. The substrate layer has a thickness of less than or equal to 1,000 μm and the mirror having at least one further metallization for thermal compensation, as a result of which a thermal deformation of the mirror is avoided or preadjusted such that the desired curvature is set as a function of the reflected power.