Deposition apparatus having thermal hood
US8709160B2 · kind B2 · utility
2Cited by
16References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 22, 2008 |
| Grant date | Apr 29, 2014 |
| Priority date | — |
| Expiry date | Nov 23, 2031 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/541
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A deposition apparatus includes a coating chamber and a coating zone within the coating chamber for coating work pieces. A heating source heats the coating zone, and a thermal hood within the coating chamber is located adjacent to the coating zone for controlling a temperature of the coating zone.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.