Piezoelectric ultrasonic transducer apparatus
US8710717B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jan 27, 2011 |
| Grant date | Apr 29, 2014 |
| Priority date | — |
| Expiry date | Jan 27, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/875
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Methods are provided for creating a metal or other electrically-conductive member extending from an air-backed cavity of a piezoelectric ultrasonic transducer (pMUT) apparatus defining such an air-backed cavity, through a substrate layer disposed adjacent to the transducer device of the pMUT device, and into electrically-conductive engagement with a first electrode of the pMUT device, such that the electrically-conductive member provides an electrically-conductive engagement between the first electrode and a conformal electrically-conductive layer deposited in the air-backed cavity of the pMUT device. Associated apparatuses are also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.