Microelectromechanical gyroscope with inversion of actuation forces, and method for actuating a microelectromechanical gyroscope
US8714012B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 15, 2011 |
| Grant date | May 6, 2014 |
| Priority date | — |
| Expiry date | May 11, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5762
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microelectromechanical gyroscope includes a body and a driving mass, which is movable with respect to the body according to a driving axis and is capacitively coupled to the body. The gyroscope moreover includes a driving device, which forms a microelectromechanical control loop with the body and the driving mass and is configured for supplying to the driving mass driving signals having a common-mode component and respective differential components so as to maintaining the driving mass in oscillation according to the driving axis. The driving device is provided with an actuation stage configured for inverting in a controlled way the sign of the differential components of the driving signals.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.