Double vacuum pump apparatus, gas purification system provided with double vacuum pump apparatus, and exhaust gas vibration suppressing device in double vacuum pump apparatus
US8715400B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 22, 2010 |
| Grant date | May 6, 2014 |
| Priority date | — |
| Expiry date | Jul 7, 2031 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04C2270/18
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A double vacuum pump apparatus (Y2) includes positive displacement vacuum pumps (40A, 40B) and lines (52, 60). Each of the vacuum pumps includes a suction port (41) and a discharge port (42), and a pressure detector (80) is provided in the vicinity of the suction port (41) of the double vacuum pump apparatus (Y2). The line (52) connects the discharge port (42) of the vacuum pump (40A) to the suction port (41) of the vacuum pump (40B). The line (60) has an end (E6) and an end (E5) that are connected to the connection line (52), and includes a buffer tube (Z1) and an on-off valve (61) located between the tube (Z1) and the end (E5). A pressure detection signal from the pressure detector (80) is used as an on/off signal for the on-off valve (61).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.