Micro-electromechanical systems (MEMS) microphone and method of manufacturing the same
US8715514B2 · kind B2 · utility
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11Claims
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Key dates
| Filing date | Mar 29, 2012 |
| Grant date | May 6, 2014 |
| Priority date | — |
| Expiry date | Oct 23, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R2201/003
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
Provided are a micro-electromechanical systems (MEMS) microphone and a method of manufacturing the same. A manufacturing process is simplified compared to a conventional art using both upper and lower substrate processes. Since defects which may occur during manufacturing are reduced due to the simplified manufacturing process, the manufacturing throughput is improved, and since durability of the MEMS microphone is improved, system stability against the external environment is improved.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.