Patent · US Active

Semiconductor device and method for manufacturing the same

US8716717B2 · kind B2 · utility

9Cited by
7References
15Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 15, 2011
Grant dateMay 6, 2014
Priority date
Expiry dateApr 15, 2031

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D62/8325
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A RESURF layer including a plurality of P-type implantation layers having a low concentration of P-type impurity is formed adjacent to an active region. The RESURF layer includes a first RESURF layer, a second RESURF layer, a third RESURF layer, a fourth RESURF layer, and a fifth RESURF layer that are arranged sequentially from the P-type base side so as to surround the P-type base. The second RESURF layer is configured with small regions having an implantation amount equal to that of the first RESURF layer and small regions having an implantation amount equal to that of the third RESURF layer being alternately arranged in multiple. The fourth RESURF layer is configured with small regions having an implantation amount equal to that of the third RESURF layer and small regions having an implantation amount equal to that of the fifth RESURF layer being alternately arranged in multiple.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.