Probe devices formed from multiple planar layers of structural material with tip regions formed from one or more intermediate planar layers
US8717055B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 3, 2011 |
| Grant date | May 6, 2014 |
| Priority date | — |
| Expiry date | Feb 13, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/06711
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Embodiments disclosed herein are directed to compliant probe structures for making temporary or permanent contact with electronic circuits and the like. In particular, embodiments are directed to various designs of cantilever-like probe structures. Some embodiments are directed to methods for fabricating such cantilever structures. In some embodiments, methods are used to form probe structures from a plurality of planar multi-material layers wherein the probe structures include a contact tip and a compliant body with the compliant body formed from at least one material that is different from the tip material and wherein compliant body provides for elastic compression of the probe in a plane of primary motion during use and wherein during formation a stacking direction of the plurality of layers is perpendicular to the plane of primary motion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.