Surface heating device for a substrate treatment device and substrate treatment device

US8718456B2 · kind B2 · utility

Assignee

• VON ARDENNE Anlagentechnik GmbH · DE

Inventors

• Michael Hentschel · Dresden, DE
• Thomas Meyer · Dresden, DE
• Hubertus Von Der Waybrink · Dresden, DE
• Marco Kenne · Dresden, DE
• Daniel Stange · Dresden, DE
• Hans Hecht · Stuttgart, DE

Key dates

• Filing date: Aug 23, 2010
• Grant date: May 6, 2014
• Expiry date: Jan 28, 2031

Classification

• Technology area (CPC F): Mechanical Engineering; Lighting; Heating
• CPC primary: F27D2099/0011
• WIPO field: Thermal processes and apparatus
• WIPO sector: Mechanical engineering

Abstract

A surface heating device for a substrate treatment device with increased power density and improved homogeneity of heat radiation includes a jacket tube heater with straight tube sections and bent tube sections in which straight tube sections are arranged parallel to each other in a main plane and straight tube sections are connected to each other by bent tube sections, so that at least part of the bent tube sections are aligned sloped relative to the main plane.