Patent · US Active

Comprehensive analysis of queue times in microelectronic manufacturing

US8718809B2 · kind B2 · utility

0Cited by
5References
25Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 12, 2010
Grant dateMay 6, 2014
Priority date
Expiry dateMar 6, 2033

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG06F2111/08
  • WIPO fieldComputer technology
  • WIPO sectorElectrical engineering

Abstract

A system for determining a group of semiconductor manufacturing process steps with a similar influence on individual semiconductor products. The system generates a first table including time stamps for the individual semiconductor products. The system creates a second table including Q-times based on the first table. The Q-times refers to time differences between every pair of the time stamps. The system forms a dependency table by grouping the Q-times with similar dependencies together. The system identifies groups of the similar dependencies. The system extracts semiconductor process steps belonging to the groups.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.