Scanning acoustic microscope with an inverted transducer and bubbler functionality
US8720273B2 · kind B2 · utility
4Cited by
27References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 23, 2011 |
| Grant date | May 13, 2014 |
| Priority date | — |
| Expiry date | Jun 13, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/2697
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scanning acoustic microscope includes a transducer mounted in a cup below a particular elevation and a coupling fluid source disposed below the particular elevation and which is adapted to introduce coupling fluid into the cup. A controller is operable to control the transducer and the coupling fluid source during testing such that ultrasonic energy can be directed upwardly through coupling fluid disposed between and contacting the transducer and a first surface of a part to be inspected. The part is disposed at the particular elevation and a second surface of the part is not contacted by coupling fluid during testing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.