Patent · US Active

Foil trap device with improved heat resistance

US8721778B2 · kind B2 · utility

1Cited by

0References

7Claims

0Family size

Assignee

KONINIKLIJKE PHILIPS N.V. · NL

Inventors

Christof Metzmacher · Verviers, BE
Michael Schaaf · Solingen, DE
Peter Klaus Bachmann · Würselen, DE

Key dates

Filing date	Sep 14, 2010
Grant date	May 13, 2014
Priority date	—
Expiry date	Oct 3, 2030

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S977/778
WIPO fieldOptics
WIPO sectorInstruments

Abstract

The present invention relates to a foil trap device for debris mitigation, in particular in an EUV system. The foil trap comprises a plurality of spaced apart foils (4) extending from an entrance side towards an exit side of the foil trap, said foils (4) being arranged to allow a straight pass of radiation between the entrance side and the exit side. The foils (4) are coated at least at entrance side edges with a layer (8, 11) of a carbon material containing a fraction of at least 60% of sp3-hybridized carbon atoms, or with a layer (8, 11) of carbon nanotubes. As an alternative, the foils (4) are made of a bulk carbon material of the above composition. The proposed foil trap offers the combination of a high thermal conductivity, a high thermo-chemical resistance against Sn and other liquid metals and a high mechanical stiffness.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.