Method for planarizing a perpendicular magnetic recording disk for thermally-assisted recording (TAR)
US8721903B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 5, 2012 |
| Grant date | May 13, 2014 |
| Priority date | — |
| Expiry date | Jun 22, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B5/8408
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A vacuum planarization method substantially improves the surface roughness of a thermally-assisted recording (TAR) disk that has a recording layer (RL) formed of a substantially chemically-ordered FePt alloy or FePt-X alloy (or CoPt alloy or CoPt-X alloy) and a segregant, like SiO2. A first amorphous carbon overcoat (OC1) is deposited on the RL and etched with a non-chemically reactive plasma to remove at least one-half the thickness of OC1. Then a second amorphous carbon overcoat (OC2) is deposited on the etched OC1. The OC2 is then reactive-ion-etched, for example in a H2/Ar plasma, to remove at least one-half the thickness of OC2. A thin third overcoat (OC3) may be deposited on the etched OC2.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.