Patent · US Active

Switchable multi perspective detector, optics therefor and method of operating thereof

US8723117B2 · kind B2 · utility

5Cited by

23References

17Claims

0Family size

Assignee

ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH · DE

Inventors

Stefan Lanio · Erding, DE
Gerald Schonecker · Munich, DE
Dieter Winkler · Munich, DE

Key dates

Filing date	Jul 6, 2012
Grant date	May 13, 2014
Priority date	—
Expiry date	Jul 6, 2032

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/2817
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A secondary charged particle detection device for detection of a signal beam is described. The device includes a detector arrangement having at least two detection elements with active detection areas, wherein the active detection areas are separated by a gap (G), a particle optics configured for separating the signal beam into a first portion of the signal beam and into at least one second portion of the signal beam, and configured for focusing the first portion of the signal beam and the at least one second portion of the signal beam. The particle optics includes an aperture plate and at least a first inner aperture openings in the aperture plate, and at least one second radially outer aperture opening in the aperture plate, wherein the aperture plate is configured to be biased to one potential surrounding the first inner aperture opening and the at least one outer aperture opening.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.