Micromechanical resonator
US8723611B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Feb 22, 2011 |
| Grant date | May 13, 2014 |
| Priority date | — |
| Expiry date | Jun 17, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/02275
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
The object of the invention is to provide an improved structure for a microelectromechanical (MEMS) resonator. According to a first aspect of the invention, the resonator structure in accordance with the invention has a characteristic frequency of oscillation in combination with a given mechanical amplitude, whereby to set said mechanical amplitude, in the resonator structure, by way anchoring at an anchor point located at a given point of the resonator structure substrate, a first element is adapted oscillatory and a second element is adapted oscillatory in such a manner that at least one of said first element and of said second element are arranged to oscillate synchronously with regard to said anchor point, whereby the location of said anchor point is selected to be substantially within the joint projection defined by the dimensions of said first and said second element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.