Patent · US Active

Method and apparatus for identifying and correcting spherical aberrations in a microscope imaging beam path

US8724103B2 · kind B2 · utility

1Cited by

9References

20Claims

0Family size

Assignee

LEICA MICROSYSTEMS CMS GMBH · DE

Inventors

Werner Knebel · Kronau, DE
Tobias Bauer · Königstein, DE
Peter Euteneuer · Biebertal, DE

Key dates

Filing date	Oct 12, 2012
Grant date	May 13, 2014
Priority date	—
Expiry date	Oct 26, 2032

Classification

Technology area (CPC G)Physics
CPC primaryG02B21/241
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A method and apparatus provide identification of a spherical error of a microscope imaging beam path in a context of microscopic imaging of a sample using a microscope having an objective. A coverslip that carries or covers the sample is arranged in the imaging beam path. A measurement beam is guided through the objective onto the sample in a decentered fashion that is outside an optical axis of the objective. The measurement beam is reflected at an interface of the coverslip with the sample and the reflected measurement beam is guided through the objective onto a detector. An intensity profile of the reflected measurement beam is detected with the detector and a presence of a spherical error from the intensity profile is determined qualitatively and/or quantitatively.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.