Patent · US Active

Photoelectric autocollimation method and apparatus based on beam drift compensation

US8724108B2 · kind B2 · utility

1Cited by

0References

14Claims

0Family size

Assignee

HARBIN INSTITUTE OF TECHNOLOGY · CN

Inventors

Jiubin Tan · Jingwei, CN
Fan Zhu · Sunnyvale, US
Jiwen Cui · Jingwei, CN

Key dates

Filing date	Jan 18, 2012
Grant date	May 13, 2014
Priority date	—
Expiry date	Jan 18, 2032

Classification

Technology area (CPC G)Physics
CPC primaryG02B27/283
WIPO fieldOptics
WIPO sectorInstruments

Abstract

Photoelectric autocollimation methods and apparatuses based on beam drift compensation are provided. The methods and apparatuses can be used to achieve a high autocollimation angle measurement accuracy. The apparatuses includes an autocollimator, a measurement mirror (12a), a beam drift monitoring and separating unit, a beam steering device (8), and a data processing controller (7). The beam drift monitoring and separating unit generate a reference beam with the same drift as the measurement beam. The measurement beam carries both angular deflection information of the measurement mirror and the angular beam drift information, while the reference beam carries only the angular beam drift information. The data processing controller gives out a signal to the beam steering device in real-time according to the magnitude of drift of the reference beam, to compensate the drift of the measurement beam.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.