Optically transduced MEMS gyro device
US8726730B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 14, 2011 |
| Grant date | May 20, 2014 |
| Priority date | — |
| Expiry date | Sep 16, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5733
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A bulk micromachined vibratory gyro in which a proof mass has a bulk substrate thickness for a large mass and high inertial sensitivity. In embodiments, optical displacement transduction is with multi-layer sub-wavelength gratings for high sensitivity and low cross-talk with non-optical drive elements. In embodiments, the vibratory gyro includes a plurality of multi-layer sub-wavelength gratings and a plurality of drive electrodes to measure motion of the proof mass induced by drive forces and/or moments and induced by the Coriolis Effect when the gyro experiences a rotation. In embodiments, phase is varied across the plurality gratings and a multi-layer grating having the best performance is selected from the plurality.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.