Membrane MEMS actuator with moving working fluid
US8727501B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 19, 2012 |
| Grant date | May 20, 2014 |
| Priority date | — |
| Expiry date | Jul 23, 2032 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2002/14177
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A liquid dispenser includes a first liquid chamber and a second liquid chamber. The first liquid chamber includes a nozzle. A liquid supply channel is in fluid communication with the second chamber. A liquid return channel is in fluid communication with the second chamber. A heater is associated with the second liquid chamber. A flexible membrane is positioned to separate and fluidically seal the first liquid chamber and the second liquid chamber relative to each other. A liquid supply provides a liquid that flows continuously from the liquid supply through the liquid supply channel through the second liquid chamber through the liquid return channel and back to the liquid supply.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.