Patent · US Active

Wide bandwidth slanted-finger contour-mode piezoelectric devices

US8729779B2 · kind B2 · utility

1Cited by
6References
24Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 9, 2010
Grant dateMay 20, 2014
Priority date
Expiry dateMay 15, 2030

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T29/42
  • WIPO fieldBasic communication processes
  • WIPO sectorElectrical engineering

Abstract

Contour-mode piezoelectric devices and methods of forming contour mode piezoelectric devices. The contour mode piezoelectric device includes a piezoelectric film having first and second surfaces and suspended so that it is spaced away from a substrate. The contour mode piezoelectric device also includes first and second patterned electrodes respectively disposed on the first and second surfaces of the piezoelectric film, at least one of the first and second patterned electrodes having variable width along a length thereof.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.