Low voltage drive for MEMS ribbon array light modulators
US8730557B2 · kind B2 · utility
1Cited by
4References
8Claims
0Family size
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Key dates
| Filing date | Oct 22, 2012 |
| Grant date | May 20, 2014 |
| Priority date | — |
| Expiry date | Nov 3, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG09G2320/0252
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A series bias voltage increases the sensitivity of a MEMS ribbon to control signal voltages. This effect is obtained because of the nonlinear dependence of ribbon deflection on applied voltage. The resulting low-voltage operation of MEMS ribbons makes them more compatible with high speed electronics.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.