Patent · US Active

Low voltage drive for MEMS ribbon array light modulators

US8730557B2 · kind B2 · utility

1Cited by
4References
8Claims
0Family size

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Inventors

Key dates

Filing dateOct 22, 2012
Grant dateMay 20, 2014
Priority date
Expiry dateNov 3, 2032

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG09G2320/0252
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A series bias voltage increases the sensitivity of a MEMS ribbon to control signal voltages. This effect is obtained because of the nonlinear dependence of ribbon deflection on applied voltage. The resulting low-voltage operation of MEMS ribbons makes them more compatible with high speed electronics.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.