Electro-mechanical transducer, method of making the transducer, liquid ejection head including the transducer, and liquid ejection apparatus including the head
US8733904B2 · kind B2 · utility
4Cited by
1References
17Claims
0Family size
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Inventor
Key dates
| Filing date | Oct 20, 2010 |
| Grant date | May 27, 2014 |
| Priority date | — |
| Expiry date | Jul 4, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
An electro-mechanical transducer includes a plurality of independent elements. Each of the plurality of independent elements includes one of a substrate and a foundation film, a first electrode of oxide disposed on the one of the substrate and the foundation film, an electro-mechanical transducer film disposed on the first electrode, a second electrode of oxide disposed on the electro-mechanical transducer film, and a third electrode of metal formed on the first electrode as a common electrode conductive to the first electrode and common to at least two of the plurality of independent elements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.