Switching device and a method for forming a switching device
US8735750B2 · kind B2 · utility
1Cited by
4References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 3, 2011 |
| Grant date | May 27, 2014 |
| Priority date | — |
| Expiry date | Jul 24, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H59/0009
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Embodiments provide a switching device. The switching device includes a substrate, which includes a contact region. The switching device further includes a vertical layer arrangement extending from the substrate next to the contact region. The vertical layer arrangement includes a control layer. The switching device further includes a freestanding silicon cantilever extending vertically from the contact region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.