Patent · US Active

Flexible heat sink with lateral compliance

US8736048B2 · kind B2 · utility

21Cited by
11References
10Claims
0Family size

Assignee

Inventor

Key dates

Filing dateFeb 16, 2012
Grant dateMay 27, 2014
Priority date
Expiry dateFeb 16, 2032

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2224/73253
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A multi-chip module (MCM) structure comprises more than one semiconductor chip lying in a horizontal plane, the MCM having individual chip contact patches on the chips and a flexible heat sink having lateral compliance and extending in a plane in the MCM and secured in a heat exchange relation to the chips through the contact patches. The MCM has a mismatch between the coefficient of thermal expansion of the heat sink and the MCM and also has chip tilt and chip height mismatches. The flexible heat sink with lateral compliance minimizes or eliminates shear stress and shear strain developed in the horizontal direction at the interface between the heat sink and the chip contact patches by allowing for horizontal expansion and contraction of the heat sink relative to the MCM without moving the individual chip contact patches in a horizontal direction.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.