Carbon nanotube MEMS assembly
US8736138B2 · kind B2 · utility
2Cited by
206References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 26, 2008 |
| Grant date | May 27, 2014 |
| Priority date | — |
| Expiry date | Nov 18, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24273
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A carbon nanotube MEMS assembly comprises a plurality of carbon nanotubes oriented into a patterned frame, the patterned frame defining at least two components of a MEMS device. An interstitial material at least partially binds adjacent carbon nanotubes one to another. At least one component of the frame is fixed and at least one component of the frame is movable relative to the fixed component.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.