Optical deflection device for scanning, ophthalmologic measurement and therapy system

US8736935B2 · kind B2 · utility

Assignee

• Carl Zeiss Meditec AG · DE

Inventors

• Gerard Antkowiak · Jena, DE
• Thomas Pabst · Leonberg, DE
• Ralf Ebersbach · Schmölln, DE
• Heino Weigand · Jena, DE
• Martin Hacker · Jena, DE

Key dates

• Filing date: Sep 20, 2010
• Grant date: May 27, 2014
• Expiry date: Sep 19, 2032

Classification

• Technology area (CPC A): Human Necessities
• CPC primary: A61F2009/00897
• WIPO field: Medical technology
• WIPO sector: Instruments

Abstract

An optical deflection unit for targeted radiation, e.g., produced by laser or superluminescent diodes, in scanning, ophthalmological measuring and therapy systems, comprises a deflection mirror, a position sensor and a control unit, which form a control circuit for minimizing the deviation of the actual positions, detected by the position sensor, from the desired positions of the deflection mirror, whereby the optical deflection unit comprises a deflection mirror, oscillatingly movable by means of non-contacting electromagnetic drives around at least one rotation axis, and which is positioned in the direction of the, at least, one rotation axis between at least two bearings. The optical deflection unit is designed may also be used for beam guidance in high and ultrahigh vacuum installations, such as UV and EUV exposure installations for semiconductor lithography.