Silver alloy electrical lapping guides (ELGs) for fabrication of disk drive sliders with magnetoresistive sensors
US8739391B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 21, 2011 |
| Grant date | Jun 3, 2014 |
| Priority date | — |
| Expiry date | May 10, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/53165
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
An air-bearing slider used in a magnetic recording disk drive has a surface that supports a magnetoresistive (MR) read head or sensor and an electrical lapping guide (ELG) adjacent to the MR sensor. The ELG is formed of a different material than the MR sensor so as to have both a high electrical resistivity and a substantially higher etch rate. When the ELG and MR sensor are etched simultaneously to form their respective back edges, the ELG will have a sharp well-defined non-tapered wall at the back edge. The ELG has a film thickness close to but generally thinner than that of the MR sensor, and a sheet resistance to generally match the resistance measurement capability of the lapping tool. The preferred material for the ELG is an alloy comprising silver (Ag) and one or more of Sn, Ge and zinc Zn.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.