Capacitive humidity detector with nanoporous hydrophilic dielectric

US8739622B2 · kind B2 · utility

Assignee

• COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

• Hubert Grange · Grenoble, FR
• Jean-Sebastien Danel · Échirolles, FR
• Brigitte Desloges · Le Pont-de-Claix, FR
• Vincent Jousseaume · Meylan, FR

Key dates

• Filing date: Jun 22, 2009
• Grant date: Jun 3, 2014
• Expiry date: Jan 16, 2031

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01G5/16
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A humidity sensor of capacitive type, a device for detecting or measuring humidity including the sensor, and a method to fabricate the sensor. The humidity sensor includes at least one nanoporous dielectric material positioned between at least one first electrode of a capacitor and at least one second electrode of the capacitor.