Noise reduction method with chopping for a merged MEMS accelerometer sensor
US8742964B2 · kind B2 · utility
38Cited by
48References
22Claims
0Family size
Assignee
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Key dates
| Filing date | Jan 16, 2013 |
| Grant date | Jun 3, 2014 |
| Priority date | — |
| Expiry date | Jan 16, 2033 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2201/0242
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
An apparatus includes a capacitance-to-voltage converter circuit configured to be electrically coupled to a micro-electromechanical system (MEMS) sensor circuit. The capacitance-to-voltage converter circuit includes a differential chopping circuit path configured to receive a differential MEMS sensor output signal and invert a polarity of the differential chopping circuit path, and a differential sigma-delta analog to digital converter (ADC) circuit configured to sample the differential MEMS sensor output signal and provide a digital signal representative of a change in capacitance of the MEMS sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.