Micromechanical sensor having a bandpass characteristic

US8746064B2 · kind B2 · utility

Assignee

• Fibercheck GmbH · DE

Inventors

• Marco Dienel · Oederan, DE
• Alexander Sorger · Oelsnitz, DE
• Jan Mehner · Neukirchen, DE

Key dates

• Filing date: Aug 25, 2011
• Grant date: Jun 10, 2014
• Expiry date: Jun 25, 2032

Classification

• Technology area (CPC G): Physics
• CPC primary: G01H13/00
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The invention relates to a micromechanical sensor having at least two spring-mass damper oscillators. The micromechanical sensor has a first spring-mass-damper oscillating system with a first resonant frequency and a second spring-mass-damper oscillating system with a second resonant frequency which is lower than the first resonant frequency. The invention also relates to a method for detection and/or measurement of oscillations by means of a sensor such as this, and to a method for production of a micromechanical sensor such as this. The first and the second spring-mass-damper oscillating systems have electrodes which oscillate in a measurement direction about electrode rest positions with electrode deflections which are equal to or proportional to deflections of the spring-mass-damper oscillators. The systems are coupled to one another by means of at least one electrostatic field, which acts on the electrodes, forming at least one capacitance with the capacitance being governed by at least one electrode area and by at least one electrode separation and/or an electrode coverage.