Apparatus and method for the plasma treatment of hollow bodies
US8746172B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 31, 2009 |
| Grant date | Jun 10, 2014 |
| Priority date | — |
| Expiry date | Nov 9, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H1/466
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention refers to an apparatus for the plasma treatment of hollow bodies, comprising a vacuum treatment chamber and means for generating the plasma, which apparatus is characterized in that the means for generating the plasma comprise an electrode of a substantially U-shaped cross-section, which is arranged in the vacuum treatment chamber, the hollow bodies immersing at least in part into the U-shaped electrode when the plasma treatment is carried out, and being moved at least temporarily relative to the U-shaped electrode. Furthermore, the present invention refers to a method for the plasma treatment of hollow bodies, in which the hollow bodies are moved into a vacuum treatment chamber in which the plasma treatment is carried out and the plasma is generated by an electromagnetic field, which method is characterized in that the hollow bodies immerse at least in part into the electromagnetic field when the plasma treatment is carried out, and that the hollow bodies are moved at least temporarily relative to the electromagnetic field.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.