Transparent conducting oxides and production thereof
US8747630B2 · kind B2 · utility
7Cited by
23References
30Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 30, 2008 |
| Grant date | Jun 10, 2014 |
| Priority date | — |
| Expiry date | Jan 22, 2033 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/086
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Transparent conducting oxides and production thereof are disclosed. An exemplary method of producing a transparent conducting oxide (TCO) material may comprise: providing a TCO target doped with either a high-permittivity oxide or a low-permittivity oxide in a process chamber. The method may also comprise depositing a metal oxide on the target in the process chamber to form a thin film having enhanced optical properties without substantially decreasing electrical quality.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.