Method and apparatus for preparation of granular polysilicon
US8747757B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 9, 2007 |
| Grant date | Jun 10, 2014 |
| Priority date | — |
| Expiry date | Jan 27, 2029 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/442
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A process for preparing granular polysilicon using a fluidized bed reactor is disclosed. Upper and lower spaces of the bed are the reaction zone and heating zone, respectively, wherein the height of the reaction gas outlet is the reference height. Reactor productivity is maximized by sufficiently providing the heat required and stably maintaining the reaction temperature in the reaction zone, without impairing the mechanical stability of the fluidized bed reactor. This is achieved through electrical resistance heating in the heating zone where an internal heater is installed between the reaction gas supplying means and the inner wall of the reactor tube, thereby heating the fluidizing gas and the silicon particles in the heating zone. The heat generated is transferred to the reaction zone by supplying the fluidizing gas at a rate silicon particles can be intermixed between the reaction zone and the heating zone in a continuous, fluidized state.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.