Patent · US Active

Method and device for the internal plasma treatment of hollow bodies

US8747962B2 · kind B2 · utility

39Cited by

8References

25Claims

0Family size

Assignee

Schott AG · DE

Inventors

Matthias Bicker · Mainz, DE
Robert Hormes · Memmingen, DE
Manfred Lohmeyer · Nackenheim, DE

Key dates

Filing date	Aug 24, 2006
Grant date	Jun 10, 2014
Priority date	—
Expiry date	Nov 24, 2030

Classification

Technology area (CPC G)Physics
CPC primaryG10K1/064
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

The invention relates to a method for the plasma treatment of workpieces, particularly workpieces in the form of hollow bodies, in which a treatment zone in a reactor chamber is at least partially evacuated, a process gas is introduced into the treatment zone, particularly into the cavity of the workpiece, and a plasma is ignited by means of injected electromagnetic energy in the process gas introduced into the treatment zone, wherein the process gas flows through the treatment zone between opposite ends of the zone during the plasma treatment.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.