Self-imageable film forming polymer, compositions thereof and devices and structures made therefrom
US8748074B2 · kind B2 · utility
4Cited by
6References
19Claims
0Family size
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Key dates
| Filing date | Nov 23, 2011 |
| Grant date | Jun 10, 2014 |
| Priority date | — |
| Expiry date | Nov 23, 2031 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC08F232/08
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Polymers and compositions for forming self-imageable films encompassing such polymers that encompass norbornene-type repeating unit having at least one phenolic functionality and maleic anhydride-type repeating unit, which can be formulated to be either positive tone imaging or negative tone imaging. The films formed thereby are useful as self-imageable layers in the manufacture of microelectronic, such as semiconductor, and optoelectronic devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.