Flexible micro bumps operably coupled to an array of nano-piezoelectric sensors

US8749120B2 · kind B2 · utility

Assignee

• XI'AN JIAOTONG UNIVERSITY · CN

Inventors

• Weihua Liu · Beijing, CN
• Hongzhong Liu · Xi'an, CN
• Xin Li · Beijing, CN

Key dates

• Filing date: Oct 28, 2011
• Grant date: Jun 10, 2014
• Expiry date: Oct 28, 2031

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T29/42

Abstract

Implementations and techniques for manufacturing flexible micro bumps operably coupled to an array of nano-piezoelectric sensors are generally disclosed. The micro bumps and coupled nano-piezoelectric device have use at least as tactile sensors. A wide variety of configurations of the micro bumps and the nano-piezoelectric device are anticipated.