Micro coil apparatus and manufacturing methods therefor
US8749337B2 · kind B2 · utility
9Cited by
14References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 16, 2012 |
| Grant date | Jun 10, 2014 |
| Priority date | — |
| Expiry date | Mar 16, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49071
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method for manufacturing a conductive coil, the method comprising using a semiconductor fabrication process (e.g. TSV) to manufacture a coil, typically a planar spiral conductive coil.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.