Self-imageable film forming polymer, compositions thereof and devices and structures made therefrom

US8753790B2 · kind B2 · utility

Assignee

• PROMERUS, LLC · US

Inventors

• Osamu Onishi · Tokyo, JP
• Haruo Ikeda · Musashino, JP
• Larry F. Rhodes · Silver Lake, US
• Paul Evans · Prior Lake, US
• Edmund Elce · Lakewood, US
• Andrew Bell · Lakewood, US
• Chad Brick · Eaton, US
• Hendra Ng · Brecksville, US
• Pramod Kandanarachchi · Edmonton, CA

Key dates

• Filing date: Jun 30, 2010
• Grant date: Jun 17, 2014
• Expiry date: May 27, 2031

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C08G2261/418
• WIPO field: Macromolecular chemistry, polymers
• WIPO sector: Chemistry

Abstract

Embodiments in accordance with the present invention encompass self-imageable film forming compositions that comprise norbornene-type polymers and that can be formulated to be either positive tone imaging or negative tone. The films formed thereby are useful in the forming of microelectronic and optoelectronics devices.